Monitor the plasma light emission at 2 wavelengths.
To achieve a high precision, miniaturization, low price.
Easily realize the monitoring of etching and cleaning of the endpoints.
Monitoring of plasma etching, cleaning the light emitting.
By using the filter to detect the 2 wavelength, the realization of miniaturization, low price. Type: rectangle.
Screen mode: no segmentation.
Output: SPDT.
Power supply voltage: DC12V F3SX-E-RR
Contact type: small load operation (AC125V, 0.1A; DC30V, 0.1A).
Operation: instantaneous action (auto reset).
Operation Department color: White (using yellow and green LED).
In the touch and the ability to protect than OMRON''s previous models have improved.
The micro volume design of 23mm is realized.
Micro design and unique combination of soft sensing.
LED has five colors (red, yellow, green, white, and blue).
Built in basic switch improves touch.
Built in basic switches in the previous model based on the OMRON to improve the protection.
Chip LED to produce a uniform surface brightness.
From the front panel installation, more convenient. Size: 48 * 48mm, terminal type.
Category: control output 2 point type (power supply AC100 ~ 240V).
Shell color: black.
Control output 1: voltage output (SSR driver).
Control output 2: voltage output (SSR driver).
Control mode: standard or heating cooling.
Auxiliary output points: 2 points.
Heater break, SSR fault detection function: single phase or three phase heater detection function.
Event input points: -.
Transfer output: -.
Communication: RS-232C.
New program type.
A new type of liquid crystal with high performance cost ratio is adopted in the 256 paragraph,
Visual angle, contrast can be improved.
Can be set up to 8 procedures (mode) x 32 (step) procedure.
High resolution 5 bit display / can display 0.01 degrees C (to achieve a small size of 48 x 48mm).
High speed sampling period 60ms.
Full of all models (capable of thermocouple /Pt/ analog input switching),
1 machines to support a variety of sensors.
Add PV/SV state display function, to see the state of the thermostat
(automatic / manual, RUN/RESET, alarm),
Interactive display PV/SV.
By supporting software (Ver.4.3 CX-Thermo),
In simple arithmetic functions (AND/OR logic and delay).
Setting the program settings that can perform flexible contact output.
The control output ON/OFF times counting function can predict the fault of the internal relay of the temperature controller.
F3SX-E-RR Operation manual/Instructions/Model selection sample download link: /searchDownload.html?Search=F3SX-E-RR&select=5